Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning
- Yong, Yuen Kuan, Liu, Kexiu, Moheimani, S. O. Reza
Tracking control of a nanopositioner using complementary sensors
- Mahmood, Iskandar A., Moheimani, S. O. Reza, Liu, Kexiu
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